Vacuum Components

We design and manufacture reliable vacuum components for our thin film deposition system. Our vacuum components are available as spare parts for our thin film deposition systems as well as for your own use.

Substrate Holder

  • Water-Cooled Copper Plate
  • Ferrofluidics Feedthrough

LN2 Cooled Workholder

  •  4" diameter holder plate featuring sample mounting provision
  • Liquid Nitrogen capacity aprox 200 cc

Rotary Dryve

  • Ferrofluidics feedtrough
  • Heavy duty shaft

Shutter Assembly

The Shutter assembly model PS350 permits to cut off the flow of target material to the substrate at any instant on the thin film deposition processes.